Invention Application
- Patent Title: APPARATUSES FOR BONDING SEMICONDUCTOR CHIPS
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Application No.: US16103071Application Date: 2018-08-14
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Publication No.: US20180358247A1Publication Date: 2018-12-13
- Inventor: Yisung Hwang , Jungchul Lee , Jaehong Kim , Taegyeong Chung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2011-0141130 20111223
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
An apparatus for bonding semiconductor chips may comprise transfer rails configured to transfer substrates, loading members configured to load the substrates onto the transfer rails, unloading members configured to unload the substrates from the transfer rails, a first wafer supply unit configured to supply a first wafer including semiconductor chips, and/or a bonding unit configured to bond the semiconductor chips to the substrates. An apparatus for bonding semiconductor chips may comprise a transfer rail configured to transfer substrates, loading members configured to load the substrates onto the transfer rail, unloading members configured to unload the substrates from the transfer rail, a buffer member at a side of the transfer rail configured to temporarily receive the substrates loaded by the loading members, a first wafer supply unit configured to supply a first wafer including semiconductor chips, and/or a bonding unit configured to bond the semiconductor chips to the substrates.
Information query
IPC分类: