Invention Application
- Patent Title: FORCE SENSING DEVICE AND A FORCE SENSING SYSTEM
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Application No.: US16006835Application Date: 2018-06-12
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Publication No.: US20180364121A1Publication Date: 2018-12-20
- Inventor: Roelof JANSEN , Xavier ROTTENBERG , Veronique ROCHUS
- Applicant: IMEC VZW
- Priority: EP17175937.6 20170614
- Main IPC: G01L11/02
- IPC: G01L11/02 ; G01L13/02

Abstract:
A force sensing device comprises: a membrane (120), which is configured to deform upon receiving a force; a first Mach Zehnder-type interferometer device (110); a second Mach Zehnder-type interferometer device (130), wherein a first measurement propagation path (114) of the first Mach Zehnder-type interferometer device (110) and a second measurement propagation path (134) of the second Mach Zehnder-type interferometer device (130) are arranged on or in the membrane (120), and wherein the first measurement propagation path (114) and the second measurement propagation path (134) are differently sensitive to applied force on the membrane (120).
Public/Granted literature
- US10775254B2 Force sensing device and a force sensing system Public/Granted day:2020-09-15
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