公开(公告)号：US20240201138A1

公开(公告)日：2024-06-20

申请号：US18532687

申请日：2023-12-07

Applicant: IMEC VZW

Inventor： Fabrice-Roland LAMBERTI ,  Roelof JANSEN ,  Xavier ROTTENBERG ,  Jon KJELLMAN

IPC: G01N29/36 ,  G01N29/24

CPC classification number: G01N29/36 ,  G01N29/2418

Abstract: A sensor device comprises: a plurality of sensors, wherein each sensor comprises an optical resonance element configured to be affected by a measurand and has a mutually unique optical resonance frequency; the sensors being configured to receive at least one of a first and a second sensor interrogation signals forming a plurality of signal component pairs, wherein a difference in frequency between the frequencies in the signal component pair is different for different signal component pairs; wherein each sensor is configured to modulate an optical intensity of at least one frequency of a mutually unique signal component pair; and a detector, being configured to receive the first sensor interrogation signal and the second sensor interrogation signal, wherein the detector is configured to detect a plurality of mutually unique beat frequencies for detecting a plurality of measurements by the plurality of sensors.

公开(公告)号：US20230375406A1

公开(公告)日：2023-11-23

申请号：US18197357

申请日：2023-05-15

Applicant: IMEC VZW ,  Katholieke Universiteit Leuven

Inventor： Vladimir PEJOVIC ,  David CHEYNS ,  Xavier ROTTENBERG ,  Kristof LODEWIJKS ,  Pawel MALINOWSKI ,  Yunlong LI ,  Gauri KARVE

IPC: G01J3/28 ,  G01J3/02 ,  H10K39/32

CPC classification number: G01J3/2823 ,  G01J3/021 ,  H10K39/32 ,  G01J2003/2826

Abstract: A light sensor for spectrally resolved light detection, said light sensor comprises: an upper reflective element; a lower reflective element; a photo-sensitive element therebetween; a spacer element, configured to form the lower reflective element or arranged between the upper and the lower reflective element; wherein the elements form a stack of layers which define a resonance structure between the upper and the lower reflective element for providing a resonance of light; wherein the spacer element comprises at least two different materials, a distribution of which is different between different pixels in an array of pixels such that a resonance wavelength is different for different pixels; and wherein for a plurality of pixels, geometrical structures smaller than the resonance wavelength are defined by the at least two different materials.

公开(公告)号：US20210033895A1

公开(公告)日：2021-02-04

申请号：US16966456

申请日：2019-01-30

Applicant: IMEC VZW

Inventor： Xavier ROTTENBERG ,  Kristof LODEWIJKS

IPC: G02F1/03 ,  G03H1/22

Abstract: An optical device for forming a distribution of a three-dimensional light field comprises: an array of individually addressable unit cells; each unit cell in the array of unit cells comprising a stack including: at least one electrode; and a resonance defining layer, comprising at least a phase change material, PCM, layer, wherein the resonance defining layer is patterned to define a geometric structure dimensioned for defining a wavelength-dependent in-plane resonance of an electromagnetic wave; wherein the at least one electrode causes a phase change of the phase change material based on receiving a control signal to alter a wavelength-dependency of resonance in the resonance defining layer for controlling the optical property of the unit cell; wherein unit cells in the array of unit cells are separated such that the PCM layer of a unit cell is separated from the PCM layer in an adjacent unit cell.

公开(公告)号：US20190206920A1

公开(公告)日：2019-07-04

申请号：US16234472

申请日：2018-12-27

Applicant: IMEC VZW

Inventor： Veronique ROCHUS ,  Xavier ROTTENBERG

IPC: H01L27/146

CPC classification number: H01L27/14636 ,  H01L27/14605 ,  H01L27/14685 ,  H01L27/14689

Abstract: A method for producing an image sensor comprises: depositing a first back-end-of-line, BEOL, layer above a substrate comprising an array of light-detecting elements, said BEOL layer comprising metal wirings being arranged to form connections to components on the substrate and together with depositing the first BEOL layer, improving planarization of the first BEOL layer by depositing a planarizing metal dummy pattern in the first BEOL layer, wherein a part of the planarizing metal dummy pattern is arranged above a light-detecting element, wherein the planarizing metal dummy patterns is formed from the same material as the metal wirings and is deposited to planarize density of the metal deposited in the first BEOL layer across a surface of the layer and wherein a shape and/or position of the metal dummy pattern above the array of light-detecting elements is designed to provide a desired effect on incident light.

公开(公告)号：US20220155438A1

公开(公告)日：2022-05-19

申请号：US17438694

申请日：2020-02-17

Applicant: IMEC VZW

Inventor： Xavier ROTTENBERG

IPC: G01S15/89

Abstract: The present invention provides an acoustic coupling interface (1) for use between a flexible ultrasound transducing device (2) and a curved object (3) to be examined. The interface (1) is in the form of a sheet (4) having a bending flexibility that permits the sheet (4) to form a continuous contact with said curved object (3) during operation of the flexible ultrasound transducing device (2). Further, the sheet (4) comprises a bulk material (5) and a plurality of acoustic waveguiding structures (6) arranged in said bulk material (5), wherein the plurality of acoustic waveguiding structures (6) is for providing bidirectional coupling of ultrasound signals (7) emitted by the ultrasound transducing device (2).

公开(公告)号：US20210111473A1

公开(公告)日：2021-04-15

申请号：US17055546

申请日：2019-05-14

Applicant: IMEC VZW

Inventor： Hanns Christoph ADELMANN ,  Florin CIUBOTARU ,  Xavier ROTTENBERG ,  Hendrikus TILMANS ,  Bruno FIGEYS

IPC: H01P7/08

Abstract: A resonator for spin waves, wherein the resonator comprises a stack of material layers arranged on a substrate, a waveguide structure formed in at least one material layer in the stack and configured to propagate a spin wave and to confine a spin wave propagating in a waveguide element of the waveguide structure, such that a spin wave of a selected frequency propagating in the waveguide structure is arranged to resonate in the waveguide structure. The resonator further comprises a control mechanism formed in at least one material layer in the stack and configured to adapt at least one property of the waveguide structure for tuning the resonance frequency of the waveguide structure.

公开(公告)号：US20220252909A1

公开(公告)日：2022-08-11

申请号：US17628657

申请日：2020-07-09

Applicant: IMEC VZW ,  KATHOLIEKE UNIVERSITEIT LEUVEN

Inventor： Anabel DE PROFT ,  Xavier ROTTENBERG ,  Kristof LODEWIJKS

IPC: G02F1/01 ,  G03H1/02 ,  G03H1/22

Abstract: According to an aspect of the present inventive concept there is provided an optical device (1) for modulating incident light (L), comprising a resonance defining layer structure (110) comprising an optical state change material (112), and an electrode layer (120) comprising at least two spaced-apart electrode elements (121, 122, 123). The electrode elements are individually addressable and arranged to cause an optical state change of a portion of the optical state change material between a first state and a second state, wherein the portion forms a geometric structure (131, 132, 133, 134, 135, 136) defined by the arrangement of the at least two spaced-apart electrode elements. The optical state change material is configured to alter an optical response of the optical device upon the optical state change between the first state and the second state, thereby determining the modulation of the incident light.

公开(公告)号：US20220152654A1

公开(公告)日：2022-05-19

申请号：US17438705

申请日：2020-03-12

Applicant: IMEC VZW ,  KATHOLIEKE UNIVERSITEIT LEUVEN

Inventor： David CHEYNS ,  Yongbin JEONG ,  Xavier ROTTENBERG

IPC: B06B1/06 ,  B06B1/02

Abstract: The present invention provides a flexible ultrasound transducer (1) for an ultrasound monitoring system for examining a curved object. The ultrasound transducer (1) comprises an integrated circuit structure (7) and a multi-layered structure (2), said multi-layered structure (2) comprising an array (3) of ultrasound transducing elements (3a) arranged in a first layer structure (4) and configured for generating ultrasonic energy propagating along a main transducer axis Z and an array (5) of control circuits (5a) arranged in a second layer structure (6), and wherein the array (5) of control circuits and the integrated circuit structure (7) are configured for operating the array (3) of ultrasound transducing elements in said first layer structure (4), Further, the multi-layered structure (2) comprises at least one flexible layer (8, 9) arranged so that the bending flexibility of the multi-layered structure (2) permits the ultrasound transducer (1) to form a continuous contact with said curved object during operation.

公开(公告)号：US20190196111A1

公开(公告)日：2019-06-27

申请号：US16231452

申请日：2018-12-22

Applicant: IMEC VZW

Inventor： Bruno FIGEYS ,  Veronique ROCHUS ,  Roelof JANSEN ,  Xavier ROTTENBERG

IPC: G02B6/35 ,  G02B6/34

Abstract: An integrated photonic device comprises: an input waveguide configured to extend in an input plane, and an output waveguide configured to extend in an output plane, wherein the output plane is parallel to or contained within the input plane; an input coupler optically coupled to the input waveguide, wherein the input coupler is configured to redirect a light signal out of the input waveguide and the input plane; a light property modifier configured to receive the light signal from the input coupler and reflect the light signal towards the output plane, wherein the light property modifier is configured to selectively adjust an optical path length of the light signal; and an output coupler optically coupled to the output waveguide, wherein the output coupler is configured to receive the reflected light signal from the light property modifier and redirect the light signal into the output waveguide and the output plane.

公开(公告)号：US20180364121A1

公开(公告)日：2018-12-20

申请号：US16006835

申请日：2018-06-12

Applicant: IMEC VZW

Inventor： Roelof JANSEN ,  Xavier ROTTENBERG ,  Veronique ROCHUS

IPC: G01L11/02 ,  G01L13/02

Abstract: A force sensing device comprises: a membrane (120), which is configured to deform upon receiving a force; a first Mach Zehnder-type interferometer device (110); a second Mach Zehnder-type interferometer device (130), wherein a first measurement propagation path (114) of the first Mach Zehnder-type interferometer device (110) and a second measurement propagation path (134) of the second Mach Zehnder-type interferometer device (130) are arranged on or in the membrane (120), and wherein the first measurement propagation path (114) and the second measurement propagation path (134) are differently sensitive to applied force on the membrane (120).