Invention Application
- Patent Title: GAS CYLINDER
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Application No.: US16028608Application Date: 2018-07-06
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Publication No.: US20190010967A1Publication Date: 2019-01-10
- Inventor: Takehiro UEDA , Takeshi AKAO
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Priority: JP2017-133812 20170707
- Main IPC: F15B15/14
- IPC: F15B15/14

Abstract:
An air cylinder includes a cylinder, a piston rod, a piston, and a controller. The piston rod has one end disposed in the cylinder and the other end protruding from the cylinder. The piston is provided at the one end of the piston rod and moves the piston rod by moving in the cylinder. The controller supplies gas into one of a space, which is a space in the cylinder directed on the piston rod side with respect to the piston, and a space, which is a space in the cylinder opposite to the space with respect to the piston, and sucks gas from an interior of the other of the spaces.
Public/Granted literature
- US10968925B2 Gas cylinder Public/Granted day:2021-04-06
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