- 专利标题: ITERATIVE DEFECT FILTERING PROCESS
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申请号: US16102112申请日: 2018-08-13
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公开(公告)号: US20190012781A1公开(公告)日: 2019-01-10
- 发明人: Saar Shabtay , Idan Kaizerman , Amir Watchs
- 申请人: Applied Materials Israel Ltd.
- 主分类号: G06T7/00
- IPC分类号: G06T7/00 ; G06K9/68
摘要:
Data indicative of a group of defect candidates may be obtained. The data may be indicative of a group of defect candidates and may include values of attributes for each defect candidate of the group of defect candidates. Sub-groups of defect candidates may be iteratively selected for review using a review recipe to classify the defect candidates in each selected sub-group based on the values of attributes of respective defect candidates and classification results of previously reviewed defect candidates. The sub-groups may be selected until a sampling stop condition is fulfilled to obtain a classification output for the wafer. Instructions specifying at least one of the sampling stop condition, the inspection recipe, or the review recipe may be altered and additional defect candidates in a next wafer may be classified by using the altered instructions.
公开/授权文献
- US10818000B2 Iterative defect filtering process 公开/授权日:2020-10-27
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