- 专利标题： FILM STRUCTURE BODY AND METHOD FOR MANUFACTURING THE SAME
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申请号： US16027574申请日： 2018-07-05
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公开(公告)号： US20190013459A1公开(公告)日： 2019-01-10
- 发明人: Takeshi KIJIMA , Yasuaki HAMADA , Yuuji HONDA
- 申请人： Advanced Material Technologies, Inc.
- 优先权： TW106122906 20170707
- 主分类号： H01L41/187
- IPC分类号： H01L41/187 ; H01L41/047 ; H01L41/083 ; H01L41/297 ; H01L41/314
摘要：
A film structure body has: a substrate that is a silicon substrate including an upper surface composed of a plane; an orientation film including a zirconium oxide film that is cubic crystal-oriented on the upper surface; and a conductive film including a platinum film that is cubic crystal-oriented on the orientation film.
公开/授权文献
- US11527706B2 Film structure body and method for manufacturing the same 公开/授权日：2022-12-13
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