Invention Application
- Patent Title: OXIDE SINTERED BODY, METHOD FOR PRODUCING SAME AND SPUTTERING TARGET
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Application No.: US16068596Application Date: 2016-12-28
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Publication No.: US20190016638A1Publication Date: 2019-01-17
- Inventor: Kenichi ITOH , Hiroyuki HARA , Shinichi HARA
- Applicant: TOSOH CORPORATION
- Applicant Address: JP Shunan-shi, Yamaguchi
- Assignee: Tosoh Corporation
- Current Assignee: Tosoh Corporation
- Current Assignee Address: JP Shunan-shi, Yamaguchi
- Priority: JP2016-002924 20160108; JP2016-230493 20161128
- International Application: PCT/JP2016/089029 WO 20161228
- Main IPC: C04B35/453
- IPC: C04B35/453 ; C04B35/64 ; H01J37/34

Abstract:
An oxide sintered body is provided which does not splash from the target surface even at the time of high power film formation, has a high film formation rate, and is used in a sputtering target capable of providing a high-refractive-index film.An oxide sintered body is used which contains zinc, niobium, aluminum and oxygen as constituent elements and in which Nb/(Zn+Nb+Al)=0.076 to 0.289 and Al/(Zn+Nb+Al)=0.006 to 0.031, where Zn, Nb and Al denote contents of zinc, niobium and aluminum, respectively.
Public/Granted literature
- US10669208B2 Oxide sintered body, method for producing same and sputtering target Public/Granted day:2020-06-02
Information query
IPC分类: