Invention Application
- Patent Title: HEIGHT MEASUREMENT APPARATUS
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Application No.: US16061471Application Date: 2016-11-28
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Publication No.: US20190017816A1Publication Date: 2019-01-17
- Inventor: Antonius Johannes Maria NELLISSEN , Jacob Roger HAARTSEN , Krassimir Todorov KRASTEV
- Applicant: ASML NETHERLANDS B.V.
- Priority: EP15201737.2 20151221
- International Application: PCT/EP2016/078930 WO 20161128
- Main IPC: G01B13/22
- IPC: G01B13/22 ; G03F7/20

Abstract:
A height measurement apparatus comprising an array of differential pressure sensors, each differential pressure sensor comprising a reference outlet and a measurement outlet, the reference outlet being a predetermined distance from a reference surface, and each differential pressure sensor further comprising an inlet configured to provide pressurized gas for the reference outlet and the measurement outlet. A flexible membrane is positioned such that a reference side of the flexible membrane is in fluid communication with the reference outlet and a measurement side of the flexible membrane is in fluid communication with the measurement outlet. The flexible membrane is configured to move when a pressure change occurs at the measurement outlet and a detector is configured to monitor the movement of the flexible membrane.
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