公开(公告)号：US20160018744A1

公开(公告)日：2016-01-21

申请号：US14772721

申请日：2014-02-26

Applicant: ASML NETHERLANDS B.V.

Inventor： Raymond Wilhelmus Louis LAFARRE ,  Satish ACHANTA ,  Matteo FILIPPI ,  Yogesh KARADE ,  Antonius Johannes Maria NELLISSEN ,  Ronal VAN DER WILK ,  Hendrikus Christoffel Maria VAN DOREMALEN ,  Wilhelmus Jacobus Johannes WELTERS

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70708

Abstract: A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

Abstract translation: 一种制造用于光刻设备的物体保持器的方法，所述物体保持器包括一个或多个电功能部件，所述方法包括：使用包括与所述物体保持器的主体不同的载体片的复合结构和层状结构 包括一个或多个层并形成在载体片上; 将复合结构连接到主体的表面，使得层状结构位于载体片和主体的表面之间; 并从复合结构中移除载体片，使分层结构连接到主体。

公开(公告)号：US20190017816A1

公开(公告)日：2019-01-17

申请号：US16061471

申请日：2016-11-28

Applicant: ASML NETHERLANDS B.V.

Inventor： Antonius Johannes Maria NELLISSEN ,  Jacob Roger HAARTSEN ,  Krassimir Todorov KRASTEV

IPC: G01B13/22 ,  G03F7/20

Abstract: A height measurement apparatus comprising an array of differential pressure sensors, each differential pressure sensor comprising a reference outlet and a measurement outlet, the reference outlet being a predetermined distance from a reference surface, and each differential pressure sensor further comprising an inlet configured to provide pressurized gas for the reference outlet and the measurement outlet. A flexible membrane is positioned such that a reference side of the flexible membrane is in fluid communication with the reference outlet and a measurement side of the flexible membrane is in fluid communication with the measurement outlet. The flexible membrane is configured to move when a pressure change occurs at the measurement outlet and a detector is configured to monitor the movement of the flexible membrane.