Invention Application
- Patent Title: CANTILEVER AND MANUFACTURING METHOD FOR CANTILEVER
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Application No.: US16121729Application Date: 2018-09-05
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Publication No.: US20190018042A1Publication Date: 2019-01-17
- Inventor: Masaki TANEMURA , Riteshkumar Ratneshkumar VISHWAKARMA , Mohamad Saufi BIN ROSMI , Yazid BIN YAAKOB , Yuji WAKAMATSU , Masashi KITAZAWA
- Applicant: NATIONAL UNIVERSITY CORPORATION NAGOYA INSTITUTE OF TECHNOLOGY , OLYMPUS CORPORATION
- Applicant Address: JP Nagoya-shi JP Tokyo
- Assignee: NATIONAL UNIVERSITY CORPORATION NAGOYA INSTITUTE OF TECHNOLOGY,OLYMPUS CORPORATION
- Current Assignee: NATIONAL UNIVERSITY CORPORATION NAGOYA INSTITUTE OF TECHNOLOGY,OLYMPUS CORPORATION
- Current Assignee Address: JP Nagoya-shi JP Tokyo
- Priority: JP2016-054095 20160317
- Main IPC: G01Q70/14
- IPC: G01Q70/14 ; G01Q70/16 ; G01Q70/12 ; B05D3/02 ; B05D3/10
Abstract:
A cantilever used in a scanning probe microscope includes a supporting section, a lever section, and a protrusion section, which is a probe. A crystalline carbon composite layer including a crystalline carbon nanomaterial and a metal material, a melting point of which is 420° C. or lower, is deposited on a distal end portion of the protrusion section.
Public/Granted literature
- US10545172B2 Cantilever and manufacturing method for cantilever Public/Granted day:2020-01-28
Information query
