公开(公告)号：US20240280606A1

公开(公告)日：2024-08-22

申请号：US18567158

申请日：2022-02-03

申请人： Hitachi, Ltd.

发明人： Masanari KOGUCHI

IPC分类号： G01Q30/02 ,  G01Q70/14

CPC分类号： G01Q30/02 ,  G01Q70/14

摘要： Between a nitrogen-vacancy center and a support portion, a cut-off portion is provided that cuts off the nitrogen-vacancy center from the support portion.

公开(公告)号：US11906546B2

公开(公告)日：2024-02-20

申请号：US17623789

申请日：2020-07-06

申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY ,  NANO ANALYTIK GMBH ,  SYNFUELS AMERICAS CORPORATION

发明人： Fangzhou Xia ,  Chen Yang ,  Yi Wang ,  Kamal Youcef-Toumi ,  Christoph Reuter ,  Tzvetan Ivanov ,  Mathias Holz ,  Ivo Rangelow

IPC分类号： G01Q10/04 ,  G01Q20/04 ,  G01Q30/14 ,  G01Q70/14 ,  G01Q70/08

CPC分类号： G01Q10/045 ,  G01Q20/04 ,  G01Q30/14 ,  G01Q70/08

摘要： Active cantilever probes having a thin coating incorporated into their design are disclosed. The probes can be operated in opaque and/or chemically harsh environments without the need of a light source or optical system and without being significantly negatively impacted by corrosion. The probes include a substrate that has a cantilever, a thermomechanical actuator associated with the cantilever, a piezoresistive stress sensor disposed on the cantilever, and a thin coating disposed on the cantilever and the piezoresistive stress sensor. The coating is bonded to the substrate, is thermally conductive, and has a low thermal resistance. Further, the thin coating is configured to have little to no impact on one or more of a mass of the active probe, a residual stress of the cantilever, or a stiffness of the active probe. Techniques for performing topography and making other measurements in an opaque and/or chemically harsh environment are also provided.

公开(公告)号：US20240044938A1

公开(公告)日：2024-02-08

申请号：US18485478

申请日：2023-10-12

申请人： President and Fellows of Harvard College

发明人： Michael S. GRINOLDS ,  Sungkun HONG ,  Patrick MALETINSKY ,  Amir YACOBY

IPC分类号： G01Q70/14 ,  G01N24/10 ,  G01R33/032 ,  G01Q60/54 ,  G01R33/12 ,  G01R33/60 ,  G01R33/022 ,  G01N21/64 ,  G01Q60/38

CPC分类号： G01Q70/14 ,  G01N24/10 ,  G01R33/032 ,  G01Q60/54 ,  G01R33/1284 ,  G01R33/60 ,  G01R33/022 ,  G01N21/645 ,  G01Q60/38 ,  G01Q30/025

摘要： A sensing probe may be formed of a diamond material comprising one or more spin defects that are configured to emit fluorescent light and are located no more than 50 nm from a sensing surface of the sensing probe. The sensing probe may include an optical outcoupling structure formed by the diamond material and configured to optically guide the fluorescent light toward an output end of the optical outcoupling structure. An optical detector may detect the fluorescent light that is emitted from the spin defects and that exits through the output end of the optical outcoupling structure after being optically guided therethrough. A mounting system may hold the sensing probe and control a distance between the sensing surface of the sensing probe and a surface of a sample while permitting relative motion between the sensing surface and the sample surface.

公开(公告)号：US11815528B2

公开(公告)日：2023-11-14

申请号：US17675156

申请日：2022-02-18

申请人： President and Fellows of Harvard College

发明人： Michael S. Grinolds ,  Sungkun Hong ,  Patrick Maletinsky ,  Amir Yacoby

IPC分类号： G01Q70/14 ,  G01N24/10 ,  G01R33/032 ,  G01Q60/54 ,  G01R33/12 ,  G01R33/60 ,  G01R33/022 ,  G01N21/64 ,  G01Q60/38 ,  G01Q30/02 ,  G01Q60/08 ,  G01R33/32

CPC分类号： G01Q70/14 ,  G01N21/645 ,  G01N24/10 ,  G01Q60/38 ,  G01Q60/54 ,  G01R33/022 ,  G01R33/032 ,  G01R33/1284 ,  G01R33/60 ,  G01N2201/10 ,  G01Q30/025 ,  G01Q60/08 ,  G01R33/323

摘要： A sensing probe may be formed of a diamond material comprising one or more spin defects that are configured to emit fluorescent light and are located no more than 50 nm from a sensing surface of the sensing probe. The sensing probe may include an optical outcoupling structure formed by the diamond material and configured to optically guide the fluorescent light toward an output end of the optical outcoupling structure. An optical detector may detect the fluorescent light that is emitted from the spin defects and that exits through the output end of the optical outcoupling structure after being optically guided therethrough. A mounting system may hold the sensing probe and control a distance between the sensing surface of the sensing probe and a surface of a sample while permitting relative motion between the sensing surface and the sample surface.

公开(公告)号：US11762046B2

公开(公告)日：2023-09-19

申请号：US17001486

申请日：2020-08-24

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

发明人： Baohua Niu ,  Ji-Feng Ying

IPC分类号： G01R33/26 ,  G01R33/12 ,  G01Q60/08 ,  G01Q60/52 ,  G01Q70/14 ,  G01Q30/02 ,  G01R33/32 ,  G01R33/032 ,  G01Q60/38

CPC分类号： G01R33/26 ,  G01Q30/025 ,  G01Q60/08 ,  G01Q60/52 ,  G01Q70/14 ,  G01R33/032 ,  G01R33/12 ,  G01R33/323 ,  G01Q60/38

摘要： An apparatus for measuring a magnetic field strength is provided. The apparatus includes a stage on which a sample to be measured is placed, a cantilever having a tip, an optical system having a light source and a light receiver, and a microwave power source. The tip is a diamond tip having a nitrogen vacancy defect. The optical system is configured such that excitation light from the light source is focused at the diamond tip. The cantilever is configured as a coaxial microwave antenna through which microwaves from the microwave power source are supplied to the diamond tip.

公开(公告)号：US20210389346A1

公开(公告)日：2021-12-16

申请号：US17445448

申请日：2021-08-19

申请人： Xallent LLC

发明人： Kwame Amponsah

IPC分类号： G01Q70/06 ,  G01Q60/30 ,  G01Q70/10 ,  G01Q70/14 ,  B41J2/165

摘要： Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.

公开(公告)号：US11035880B2

公开(公告)日：2021-06-15

申请号：US16802944

申请日：2020-02-27

申请人： IMEC VZW ,  Katholieke Universiteit Leuven, KU LEUVEN R&D

发明人： Thomas Hantschel ,  Thijs Boehme

IPC分类号： G01Q70/14 ,  G01Q70/06 ,  G01Q10/04 ,  G01Q60/02

摘要： Example embodiments relate to methods for producing a probe suitable for scanning probe microscopy. One embodiment includes a method for producing a probe tip suitable for scanning probe microscopy. The method includes producing a probe tip body that includes at least an outer layer of a probe material. The method also includes, during the production of the probe tip body or after the production, forming a mask layer on the outer layer of probe material. Further, the method includes subjecting the probe tip body to a plasma etch procedure. The mask layer acts as an etch mask for the plasma etch procedure. The plasma etch procedure and the etch mask are configured to produce one or more tip portions formed of the probe material. The one or more tip portions are smaller and more pointed than the probe tip body prior to the plasma etch procedure.

公开(公告)号：US20210116476A1

公开(公告)日：2021-04-22

申请号：US17069228

申请日：2020-10-13

申请人： IMEC VZW

发明人： Thomas Hantschel ,  Hugo Bender ,  Kristof Paredis ,  Antti Kanniainen

IPC分类号： G01Q70/10 ,  G01Q70/14

摘要： The disclosure is related to a method for performing SPM measurements, wherein a sample is attached to a cantilever and scanned across a tip. The tip is one of several tips present on a substrate comprising at least two different types of tips on its surface, thereby enabling performance of multiple SPM measurements requiring a different type of tip, without replacing the cantilever. The at least two different types of tips are different in terms of their material, in terms of their shape or size, and/or in terms of the presence or the type of active or passive components mounted on or incorporated in the substrate, and associated to tips of one or more of the different types. The disclosure is equally related to a substrate comprising a plurality of tips suitable for use in the method of the disclosure.

公开(公告)号：US10782314B2

公开(公告)日：2020-09-22

申请号：US15971484

申请日：2018-05-04

申请人： BOE TECHNOLOGY GROUP CO., LTD. ,  BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.

发明人： Pijian Cheng ,  Jing Xue ,  Hongyan Xing ,  Yanyan Yin ,  Yue Gu ,  Yubing Song

IPC分类号： G01Q70/02 ,  G01R1/067 ,  G01Q70/10 ,  G01Q70/14 ,  G01Q70/16 ,  G01R1/073

摘要： A probe assembly is provided, which is applied to an electrical testing device. The probe assembly includes a probe body, which includes a testing end configured to contact with a to-be-tested device and a connection end opposite to the testing end; an elastic connection structure configured to be deformed when the probe body is subjected to a pressure; and a fixing base. The connection end is fixedly connected to the fixing base via the elastic connection structure. A testing device is further provided.

公开(公告)号：US10768202B2

公开(公告)日：2020-09-08

申请号：US15747183

申请日：2016-08-29

申请人： THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA

发明人： Robert W. Carpick ,  Harmandeep S. Khare ,  Nitya Nand Gosvami ,  Imene Lahouij

IPC分类号： G01Q60/42 ,  G03F7/00 ,  G01Q30/14 ,  B82Y35/00 ,  G01Q10/06 ,  G01Q60/26 ,  G01Q70/14 ,  G01Q80/00 ,  G01Q20/02

摘要： The presently disclosed subject matter provides systems and methods for generating nanostructures from tribological films. A probe tip can be immersed in a liquid mixture comprising a plurality of ink particles suspended in a medium. A substrate on which the tribological film is to be generated can also be immersed in the liquid mixture. A processor controlling movement of the probe tip can be configured to cause the probe tip to slide along the substrate in a shape of a desired pattern of the nanostructure with a contact force to cause one or more ink particles of the plurality of ink particles compressed underneath the probe tip to be transformed into a tribological film onto the substrate in the shape of the desired pattern of the nanostructure.