Invention Application
- Patent Title: UTILIZING MULTIPLE LAYERS TO INCREASE SPATIAL FREQUENCY
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Application No.: US15801039Application Date: 2017-11-01
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Publication No.: US20190067024A1Publication Date: 2019-02-28
- Inventor: Lawrence A. Clevenger , John H. Zhang , Carl Radens
- Applicant: International Business Machines Corporation
- Main IPC: H01L21/308
- IPC: H01L21/308 ; H01L21/02 ; H01L21/311 ; H01L21/768
Abstract:
A chemical material is deposited on a surface of a substrate. A mandrel composition is deposited on a surface of the chemical material. A mandrel hard mask pattern is deposited on a surface of the mandrel composition. The mandrel composition is etched. The mandrel hard mask pattern is removed. A plurality of spacer materials are deposited sequentially onto a surface of the chemical material and a surface of the mandrel composition. A portion of each of the plurality of spacer materials are removed sequentially. A remainder of the mandrel composition is removed. The substrate is etched. The chemical material and at least one of the spacer materials of the plurality of spacer materials are removed.
Public/Granted literature
- US10325778B2 Utilizing multiple layers to increase spatial frequency Public/Granted day:2019-06-18
Information query
IPC分类:
