Invention Application
- Patent Title: Laser Produced Plasma Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element
-
Application No.: US16030693Application Date: 2018-07-09
-
Publication No.: US20190075641A1Publication Date: 2019-03-07
- Inventor: Alexey Kuritsyn , Brian Ahr , Rudy F. Garcia , Frank Chilese , Oleg Khodykin
- Applicant: KLA-Tencor Corporation
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.
Public/Granted literature
- US10893599B2 Laser produced plasma light source having a target material coated on a cylindrically-symmetric element Public/Granted day:2021-01-12
Information query