Invention Application
- Patent Title: MEASUREMENT DEVICE AND SEMICONDUCTOR MANUFACTURING SYSTEM INCLUDING THE SAME
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Application No.: US15894217Application Date: 2018-02-12
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Publication No.: US20190080943A1Publication Date: 2019-03-14
- Inventor: SANG-SOO KIM , Sung-Kyu Park , Seung-Hwan Kim , Yun-Young Kim , Jun-Woo Park
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Priority: KR10-2017-0116654 20170912
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01N21/3581 ; G01N21/95
Abstract:
A measurement device includes an emitter configured to emit an electromagnetic signal to an object to be measured. A first detector is disposed to measure a first portion of the electromagnetic signal that is reflected by the object to be measured. A second detector is disposed to measure a second portion of the electromagnetic signal that is transmitted through the object to be measured. The emitter is configured to emit the electromagnetic signal in a direction substantially perpendicular to a surface of the object to be measured.
Information query
IPC分类:
