Invention Application
- Patent Title: VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM FOR MATERIAL CO-DEPOSITION
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Application No.: US16185966Application Date: 2018-11-09
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Publication No.: US20190081199A1Publication Date: 2019-03-14
- Inventor: John Barden , Rick C. Powell
- Applicant: First Solar, Inc.
- Applicant Address: US OH Perrysburg
- Assignee: First Solar, Inc.
- Current Assignee: First Solar, Inc.
- Current Assignee Address: US OH Perrysburg
- Main IPC: H01L31/18
- IPC: H01L31/18 ; C23C14/22 ; C23C14/24 ; C23C16/448 ; H01L21/02 ; H01L31/0296 ; H01L31/046 ; C23C14/56
Abstract:
An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.
Public/Granted literature
- US10749068B2 Vapor transport deposition method and system for material co-deposition Public/Granted day:2020-08-18
Information query
IPC分类:
