- 专利标题: APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITORING HEALTH OF THE PLASMA SYSTEM
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申请号: US15705643申请日: 2017-09-15
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公开(公告)号: US20190089135A1公开(公告)日: 2019-03-21
- 发明人: Atul Gupta , Colin Sanford , Joshua Lamontagne , Kevin Wenzel
- 申请人: MKS Instruments, Inc.
- 申请人地址: US MA Andover
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Andover
- 主分类号: H01T23/00
- IPC分类号: H01T23/00 ; B08B9/032
摘要:
An apparatus and method for determining the health of a plasma system by igniting a plasma within a plasma confining volume generate an ignition signal with an ignition circuit and apply the ignition signal between a biased region and a grounded region in the vicinity of the plasma confining volume. A parameter in the ignition circuit is sensed, and the sensed parameter is compared to a first parameter threshold. A condition associated with the plasma confining volume is determined if the sensed parameter differs from the first voltage threshold, and a corrective action can be taken.
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