Invention Application
- Patent Title: SUPERCONFORMAL FILLING COMPOSITION AND SUPERCONFORMALLY FILLING A RECESSED FEATURE OF AN ARTICLE
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Application No.: US16043358Application Date: 2018-07-24
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Publication No.: US20190093248A1Publication Date: 2019-03-28
- Inventor: DANIEL JOSELL , THOMAS P. MOFFAT
- Applicant: Government of the United States of America, as Represented by the Secretary of Commerce
- Main IPC: C25D3/48
- IPC: C25D3/48 ; C25D5/10 ; C25D5/18 ; C25D5/04 ; H01M4/88

Abstract:
Superconformally filling a recessed feature includes: contacting the recessed feature with superconformal filling composition that includes: Au(SO3)23− anions; SO32− anions; and Bi3+ cations; convectively transporting Au(SO3)23− and Bi3+ to the bottom member of the recessed feature; subjecting the recessed feature to an electrical current to superconformally deposit gold from the Au(SO3)23− on the bottom member relative to the sidewall and the field, the electrical current providing a cathodic voltage; and increasing the electrical current subjected to the field and the recessed feature to maintain the cathodic voltage between −0.85 V and −1.00 V relative to the SSE during superconformally depositing gold on the substrate to superconformally fill the recessed feature of the article with gold as a superconformal filling of gold, the superconformal filling being void-free and seam-free.
Public/Granted literature
- US10889908B2 Superconformal filling composition and superconformally filling a recessed feature of an article Public/Granted day:2021-01-12
Information query