- 专利标题: MANUFACTURING METHOD OF PACKAGE STRUCTURE
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申请号: US15713717申请日: 2017-09-25
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公开(公告)号: US20190096821A1公开(公告)日: 2019-03-28
- 发明人: Chia-Wei Chiang , Li-Chih Fang , Ji-Cheng Lin , Che-Min Chu , Chun-Te Lin
- 申请人: Powertech Technology Inc.
- 申请人地址: TW Hsinchu County
- 专利权人: Powertech Technology Inc.
- 当前专利权人: Powertech Technology Inc.
- 当前专利权人地址: TW Hsinchu County
- 主分类号: H01L23/552
- IPC分类号: H01L23/552 ; H01L23/00 ; H01L21/56
摘要:
A manufacturing method of a package structure including the following steps is provided. A plurality of first conductive connectors and a second conductive connector on an active surface of a die are formed. The first conductive connectors are electrically connected to the die. The second conductive connector is formed aside the first conductive connectors and electrically insulated to the die. A redistribution layer is formed on the die. The redistribution layer is electrically connected to the first conductive connectors and the second conductive connector. A conductive shield is formed on the redistribution layer to surround the second conductive connector and at least a portion of a sidewall of the die coupled the active surface. The die is electrically insulated from the conductive shield. Another manufacturing method of a package structure is also provided.
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