- 专利标题: OPTICAL POSITION-MEASURING DEVICE
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申请号: US16154750申请日: 2018-10-09
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公开(公告)号: US20190120609A1公开(公告)日: 2019-04-25
- 发明人: Wolfgang Holzapfel , Karsten Saendig
- 申请人: DR. JOHANNES HEIDENHAIN GmbH
- 优先权: DE102017219125.2 20171025
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01D5/347 ; G01D5/34
摘要:
An optical position-measuring device for sensing a position of two relatively movable objects includes a scale connected to one object and having a measuring graduation. A scanning unit is disposed on the other object and has optical elements. An arrangement and design of the optical elements of the scanning unit results in a scanning beam path in which split and subsequently interfered sub-beams propagate mirror-symmetrically with respect to a plane of symmetry and either impinge on and/or are reflected back from the scale in a V-shape. The plane of symmetry is tilted by a defined tilt angle relative to the scale about an axis of rotation that is oriented parallel to a surface of the scale and extends perpendicular to the graduation direction. The sub-beams that are interfered are deflected at the measuring graduation into symmetric diffraction orders. The sub-beams travel identical optical path lengths between splitting and recombination.
公开/授权文献
- US10527405B2 Optical position-measuring device 公开/授权日:2020-01-07
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