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公开(公告)号:US09200927B2
公开(公告)日:2015-12-01
申请号:US14093552
申请日:2013-12-02
CPC分类号: G01D5/3473 , G01D5/34715 , G01D5/38
摘要: A position-measuring device includes a cylindrical object rotatable about a longitudinal axis and having a circumferential annular reflection measuring graduation. A stationary scanning unit is disposed opposite the cylindrical object and has a light source, a transmission grating and a detector. The scanning unit is configured to optically scan the reflection measuring graduation by beams of light emitted from the light source passing through the transmission grating and then striking the reflection measuring graduation, from where the beams of light are reflected back toward the detector, which is configured to generate rotation-dependent position signals. An optically effective perpendicular distance between the detector and the reflection measuring graduation is selected to be one of greater or less than an optically effective perpendicular distance between the transmission grating and the reflection measuring graduation depending on a radius of the cylindrical object.
摘要翻译: 位置测量装置包括可围绕纵向轴线旋转并且具有圆周环形反射测量刻度的圆柱形物体。 固定扫描单元设置成与圆柱形物体相对,并具有光源,透射光栅和检测器。 扫描单元被配置为通过从通过透射光栅的光源发射的光束光学扫描反射测量刻度,然后冲击反射测量刻度,其中光束从反射回到检测器,其被配置 以产生与旋转相关的位置信号。 检测器和反射测量刻度之间的光学上有效的垂直距离选择为大于或小于透射光栅与根据圆柱形物体的半径的反射测量刻度之间的光学有效垂直距离之一。
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公开(公告)号:US09395176B2
公开(公告)日:2016-07-19
申请号:US14155447
申请日:2014-01-15
发明人: Karsten Saendig
摘要: The present invention relates to an optical position-measuring device for generating a plurality of phase-shifted scanning signals regarding the relative position of a fiber optic scanning head and a reflection measuring standard movable relative thereto in at least one measuring direction. In the fiber optic scanning head, a scanning reticle is disposed before the measuring standard end of an optical fiber. The scanning signals are coded in a wavelength-dependent manner. To this end, a beam incident on the scanning reticle is split into at least two sub-beams which strike the reflection measuring standard and are subsequently recombined to interfere with each other so as to generate the phase-shifted scanning signals. The sub-beams travel different optical path lengths between splitting and recombination.
摘要翻译: 本发明涉及一种光学位置测量装置,用于在至少一个测量方向上产生关于光纤扫描头和相对于其移动的反射测量标准的相对位置的多个相移扫描信号。 在光纤扫描头中,在光纤的测量标准端之前设置扫描掩模版。 扫描信号以波长相关的方式进行编码。 为此,入射到扫描掩模版上的光束被分成至少两个分光束,该至少两个子光束进入反射测量标准,并随后被重新组合以相互干扰,以产生相移的扫描信号。 子光束在分裂和复合之间传播不同的光程长度。
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公开(公告)号:US20160109216A1
公开(公告)日:2016-04-21
申请号:US14870158
申请日:2015-09-30
发明人: Karsten Saendig
CPC分类号: G01D5/34746 , G01B9/02097 , G01B11/00 , G01B11/002
摘要: An optical position-measuring device includes a scanning unit and a material measure that is movable relative thereto in a measuring direction. The scanning unit includes a splitting device and an optoelectronic detector arrangement. The splitting device is configured to separate sub-beams incident thereon as a function of wavelength. The splitting device is configured as an asymmetrical interferometer that includes two interferometer arms having different optical path lengths, within which the sub-beams propagate between splitting and recombination until the recombined sub-beams arrive at the detector arrangement. The optical position-measuring device is configured to generate a plurality of phase-shifted scanning signals indicative of a relative position of the scanning unit and of the material measure, wherein phase relations of the generated phase-shifted scanning signals are wavelength-dependent.
摘要翻译: 光学位置测量装置包括扫描单元和在测量方向上相对于其移动的材料测量。 扫描单元包括分离装置和光电子检测器装置。 分离装置被配置为将入射到其上的子光束分离为波长的函数。 分离装置被配置为不对称干涉仪,其包括具有不同光程长度的两个干涉仪臂,其中子束在分裂和复合之间传播,直到重新组合的子光束到达检测器装置。 光学位置测量装置被配置为产生指示扫描单元和材料测量的相对位置的多个相移扫描信号,其中所生成的相移扫描信号的相位关系是波长相关的。
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公开(公告)号:US20140151540A1
公开(公告)日:2014-06-05
申请号:US14093552
申请日:2013-12-02
IPC分类号: G01D5/347
CPC分类号: G01D5/3473 , G01D5/34715 , G01D5/38
摘要: A position-measuring device includes a cylindrical object rotatable about a longitudinal axis and having a circumferential annular reflection measuring graduation. A stationary scanning unit is disposed opposite the cylindrical object and has a light source, a transmission grating and a detector. The scanning unit is configured to optically scan the reflection measuring graduation by beams of light emitted from the light source passing through the transmission grating and then striking the reflection measuring graduation, from where the beams of light are reflected back toward the detector, which is configured to generate rotation-dependent position signals. An optically effective perpendicular distance between the detector and the reflection measuring graduation is selected to be one of greater or less than an optically effective perpendicular distance between the transmission grating and the reflection measuring graduation depending on a radius of the cylindrical object.
摘要翻译: 位置测量装置包括可围绕纵向轴线旋转并且具有圆周环形反射测量刻度的圆柱形物体。 固定扫描单元设置成与圆柱形物体相对,并具有光源,透射光栅和检测器。 扫描单元被配置为通过从通过透射光栅的光源发射的光束光学扫描反射测量刻度,然后冲击反射测量刻度,其中光束从反射回到检测器,其被配置 以产生与旋转相关的位置信号。 检测器和反射测量刻度之间的光学上有效的垂直距离选择为大于或小于透射光栅与根据圆柱形物体的半径的反射测量刻度之间的光学有效的垂直距离之一。
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公开(公告)号:US10527405B2
公开(公告)日:2020-01-07
申请号:US16154750
申请日:2018-10-09
摘要: An optical position-measuring device for sensing a position of two relatively movable objects includes a scale connected to one object and having a measuring graduation. A scanning unit is disposed on the other object and has optical elements. An arrangement and design of the optical elements of the scanning unit results in a scanning beam path in which split and subsequently interfered sub-beams propagate mirror-symmetrically with respect to a plane of symmetry and either impinge on and/or are reflected back from the scale in a V-shape. The plane of symmetry is tilted by a defined tilt angle relative to the scale about an axis of rotation that is oriented parallel to a surface of the scale and extends perpendicular to the graduation direction. The sub-beams that are interfered are deflected at the measuring graduation into symmetric diffraction orders. The sub-beams travel identical optical path lengths between splitting and recombination.
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公开(公告)号:US20190120609A1
公开(公告)日:2019-04-25
申请号:US16154750
申请日:2018-10-09
CPC分类号: G01B11/026 , G01D5/344 , G01D5/34715 , G01D5/38
摘要: An optical position-measuring device for sensing a position of two relatively movable objects includes a scale connected to one object and having a measuring graduation. A scanning unit is disposed on the other object and has optical elements. An arrangement and design of the optical elements of the scanning unit results in a scanning beam path in which split and subsequently interfered sub-beams propagate mirror-symmetrically with respect to a plane of symmetry and either impinge on and/or are reflected back from the scale in a V-shape. The plane of symmetry is tilted by a defined tilt angle relative to the scale about an axis of rotation that is oriented parallel to a surface of the scale and extends perpendicular to the graduation direction. The sub-beams that are interfered are deflected at the measuring graduation into symmetric diffraction orders. The sub-beams travel identical optical path lengths between splitting and recombination.
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公开(公告)号:US10082410B2
公开(公告)日:2018-09-25
申请号:US14870158
申请日:2015-09-30
发明人: Karsten Saendig
CPC分类号: G01D5/34746 , G01B9/02097 , G01B11/00 , G01B11/002
摘要: An optical position-measuring device includes a scanning unit and a material measure that is movable relative thereto in a measuring direction. The scanning unit includes a splitting device and an optoelectronic detector arrangement. The splitting device is configured to separate sub-beams incident thereon as a function of wavelength. The splitting device is configured as an asymmetrical interferometer that includes two interferometer arms having different optical path lengths, within which the sub-beams propagate between splitting and recombination until the recombined sub-beams arrive at the detector arrangement. The optical position-measuring device is configured to generate a plurality of phase-shifted scanning signals indicative of a relative position of the scanning unit and of the material measure, wherein phase relations of the generated phase-shifted scanning signals are wavelength-dependent.
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公开(公告)号:US20140218746A1
公开(公告)日:2014-08-07
申请号:US14155447
申请日:2014-01-15
发明人: Karsten Saendig
IPC分类号: G01B11/14
摘要: The present invention relates to an optical position-measuring device for generating a plurality of phase-shifted scanning signals regarding the relative position of a fiber optic scanning head and a reflection measuring standard movable relative thereto in at least one measuring direction. In the fiber optic scanning head, a scanning reticle is disposed before the measuring standard end of an optical fiber. The scanning signals are coded in a wavelength-dependent manner. To this end, a beam incident on the scanning reticle is split into at least two sub-beams which strike the reflection measuring standard and are subsequently recombined to interfere with each other so as to generate the phase-shifted scanning signals. The sub-beams travel different optical path lengths between splitting and recombination.
摘要翻译: 本发明涉及一种光学位置测量装置,用于在至少一个测量方向上产生关于光纤扫描头和相对于其移动的反射测量标准的相对位置的多个相移扫描信号。 在光纤扫描头中,在光纤的测量标准端之前设置扫描掩模版。 扫描信号以波长相关的方式进行编码。 为此,入射到扫描掩模版上的光束被分成至少两个分光束,该至少两个子光束进入反射测量标准,并随后被重新组合以相互干扰,以产生相移的扫描信号。 子光束在分裂和复合之间传播不同的光程长度。
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