Invention Application
- Patent Title: WEAR AMOUNT MEASURING APPARATUS AND METHOD, TEMPERATURE MEASURING APPARATUS AND METHOD AND SUBSTRATE PROCESSING SYSTEM
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Application No.: US16239047Application Date: 2019-01-03
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Publication No.: US20190137260A1Publication Date: 2019-05-09
- Inventor: Tatsuo MATSUDO
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Priority: JP2013-259228 20131216
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01B9/02 ; H01J37/32 ; G01K5/48

Abstract:
A wear amount measuring apparatus includes a light source, a light transmission unit, a first and a second irradiation unit, a spectroscope and an analysis unit. The light transmission unit splits a low-coherence light from the light source into a first and a second low-coherence light. The first and the second irradiation units irradiate the first and the second low-coherence light to the component to receive reflected lights from the component. The light transmission unit transmits the reflected lights received by the first irradiation unit and the second irradiation unit to the spectroscope. The spectroscope configured to detect intensity distribution of the reflected lights from the first and the second irradiation unit. The analysis unit calculates a thickness difference between a thickness of the component at the first measuring point and that at the second measuring point by performing Fourier transform on the intensity distribution.
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