发明申请

Thermal Flowmeter
摘要:
The object of the invention is to obtain a thermal flowmeter which effectively causes water droplets to be directed to a discharge port when the water droplets adhered to a wall surface of a first passage are drawn into a third passage portion. A thermal flowmeter of the present invention includes a sub-passage that takes a measurement gas flowing through a main passage; and a flow detection unit that measures a flow rate of the measurement gas by performing heat transfer with the measurement gas flowing through a sub-passage. Further, the sub-passage includes a first passage, a second passage portion branching in the middle of the first passage portion to be directed toward the flow detection unit; and a third passage portion branching in the middle of the second passage portion to be directed toward a third outlet, and a pressure loss generation means is provided between a third inlet and the third outlet of the third passage portion.
公开/授权文献
信息查询
0/0