Invention Application
- Patent Title: METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
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Application No.: US16253158Application Date: 2019-01-21
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Publication No.: US20190157445A1Publication Date: 2019-05-23
- Inventor: Li-Wei Feng , Shih-Hung Tsai , Chao-Hung Lin , Chih-Kai Hsu , Yu-Hsiang Hung , Jyh-Shyang Jenq
- Applicant: UNITED MICROELECTRONICS CORP.
- Priority: CN201510159728.3 20150407
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66

Abstract:
A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region and a second region; forming a first fin-shaped structure on the first region and a second fin-shaped structure on the second region; forming a first spacer adjacent to the first fin-shaped structure and a second spacer adjacent to the second fin-shaped structure; and using the first spacer and the second spacer as mask to remove part of the substrate for forming a third fin-shaped structure on the first region and a fourth fin-shaped structure on the second region, in which the third fin-shaped structure includes a first top portion and a first bottom portion and the fourth fin-shaped structure includes a second top portion and a second bottom portion;
Information query
IPC分类: