- 专利标题: EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS
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申请号: US16097640申请日: 2017-04-05
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公开(公告)号: US20190163066A1公开(公告)日: 2019-05-30
- 发明人: Gijs KRAMER , Martijn HOUBEN , Nicholas Peter WATERSON , Thibault Simon Mathieu LAURENT , Yuri Johannes Gabriël VAN DE VIJVER , Marcus Martinus Petrus Adrianus VERMEULEN , Simon Karel RAVENSBERGEN , Vincentius Fransiscus CLOOSTERMAN , Siegfried Alexander TROMP , Coen Hubertus Matheus BALTIS , Justin Johannes Hermanus GERRITZEN , Niek Jacobus Johannes ROSET
- 申请人: ASML NETHERLANDS B.V.
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 优先权: EP16169457.5 20160512
- 国际申请: PCT/EP2017/058076 WO 20170405
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
An extraction body for a support apparatus of a lithographic apparatus. The support apparatus is configured to support an object. The extraction body is formed with an opening at a surface thereof. The opening extends within the extraction body forming a first passageway. The first passageway is configured to fluidly communicate an extraction channel in the extraction body to liquid between the surface and the object. A first pressure in the extraction channel is less than ambient pressure. At least a part of the first passageway is sized and dimensioned such that when the liquid enters the first passageway via the opening, a second pressure in the first passageway associated with surface tension of the liquid is lower than the first pressure such that at least a portion of the liquid is retained in the first passageway.
公开/授权文献
- US10705426B2 Extraction body for lithographic apparatus 公开/授权日:2020-07-07
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