Invention Application
- Patent Title: OPTICAL SYSTEM, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
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Application No.: US16241462Application Date: 2019-01-07
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Publication No.: US20190212659A1Publication Date: 2019-07-11
- Inventor: Hartmut ENKISCH , Thomas SCHICKETANZ , Matus KALISKY , Oliver DIER
- Applicant: Carl Zeiss SMT GmbH
- Priority: DE102016212373.4 20160707
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G21K1/06

Abstract:
An optical system, in particular for a microlithographic projection exposure apparatus, with at least one mirror (200) which has an optically effective surface and, for electromagnetic radiation of a predefined operating wavelength impinging on the optically effective surface at an angle of incidence of at least 65° relative to the respective surface normal, has a reflectivity of at least 0.5. The mirror has a reflection layer (210) and a compensation layer (220) which is arranged above this reflection layer (210) in the direction of the optically effective surface. The compensation layer (220), for an intensity distribution generated in a pupil plane or a field plane of the optical system during operation thereof, reduces the difference between the maximum and the minimum intensity value by at least 20% compared to an analogous structure without the compensation layer.
Public/Granted literature
- US10520827B2 Optical system, in particular for a microlithographic projection exposure apparatus Public/Granted day:2019-12-31
Information query
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