• Patent Title: METHOD FOR MANUFACTURING A MAGNETIC TUNNEL JUNCTION DEVICE AND DEVICE MANUFACTURED USING SUCH METHOD
  • Application No.: US16236051
    Application Date: 2018-12-28
  • Publication No.: US20190221608A1
    Publication Date: 2019-07-18
  • Inventor: Gouri Sankar KarStefan Cosemans
  • Applicant: IMEC vzw
  • Priority: EP17211020.7 20171229
  • Main IPC: H01L27/22
  • IPC: H01L27/22 H01L43/02 H01L43/12
METHOD FOR MANUFACTURING A MAGNETIC TUNNEL JUNCTION DEVICE AND DEVICE MANUFACTURED USING SUCH METHOD
Abstract:
A magnetic tunnel junction memory device is disclosed. In one aspect, the memory device comprises a substrate, a first memory element, and a second memory element, wherein the first memory element and the second memory element are formed of a stack comprising at least a first layer and a second layer, the first layer being arranged between the substrate and the second layer. The memory device further comprises a first selector device arranged to contact the first memory element, and a second selector device arranged to contact the second memory element, wherein the first selector device and the second selector device are arranged in or above the second layer. The first memory element and the second memory element are interconnected via the first layer, and are separated from each other by a trench formed in the second layer.
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