Invention Application
- Patent Title: ACID GENERATORS AND PHOTORESISTS COMPRISING SAME
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Application No.: US16371908Application Date: 2019-04-01
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Publication No.: US20190227433A1Publication Date: 2019-07-25
- Inventor: James W. Thackeray , Paul J. Labeaume , James F. Cameron
- Applicant: Rohm and Haas Electronic Materials LLC
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; G03F7/038

Abstract:
Acid generator compounds are provided that are particularly useful as a photoresist composition component. In one preferred aspect, photoresists are provided that comprise (i) a polymer; (ii) a first onium salt acid generator that produces a first acid upon exposure of the photoresist composition to activating radiation; and (iii) a second onium salt acid generator that 1) comprises a covalently bound acid-labile moiety and 2) produces a second acid upon exposure of the photoresist composition to activating radiation, wherein the first acid and second acid have pKa values that differ by at least 0.5.
Information query
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