- 专利标题： CAPACITOR INCLUDING ELECTRODE AND DIELECTRIC LAYER EACH CONTAINING SILICON, AND METHOD FOR MANUFACTURING CAPACITOR
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申请号： US16259102申请日： 2019-01-28
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公开(公告)号： US20190252488A1公开(公告)日： 2019-08-15
- 发明人: TAKAHIRO KOYANAGI , YUUKO TOMEKAWA , TAKESHI HARADA , YOSHIO KAWASHIMA
- 申请人： Panasonic Intellectual Property Management Co., Ltd.
- 优先权： JP2018-025144 20180215
- 主分类号： H01L49/02
- IPC分类号： H01L49/02 ; H01L21/3215 ; H01L21/285 ; H01L21/02
摘要：
A capacitor includes a first electrode; a second electrode facing the first electrode; and a dielectric layer which is disposed between the first electrode and the second electrode and which is in contact with the first electrode. The first electrode includes a first portion including an interface between the first electrode and the dielectric layer, the dielectric layer includes a second portion including the interface, and the first portion and the second portion each contain silicon. A concentration distribution of the silicon along a thickness direction of the first portion and the second portion includes a convex portion intersecting the interface.
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