公开(公告)号：US20190252488A1

公开(公告)日：2019-08-15

申请号：US16259102

申请日：2019-01-28

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TAKAHIRO KOYANAGI ,  YUUKO TOMEKAWA ,  TAKESHI HARADA ,  YOSHIO KAWASHIMA

IPC: H01L49/02 ,  H01L21/3215 ,  H01L21/285 ,  H01L21/02

CPC classification number: H01L28/40 ,  H01L21/02181 ,  H01L21/02189 ,  H01L21/02205 ,  H01L21/0228 ,  H01L21/28568 ,  H01L21/3215 ,  H01L27/10814 ,  H01L27/10852 ,  H01L27/14609 ,  H01L28/60 ,  H01L28/91

Abstract: A capacitor includes a first electrode; a second electrode facing the first electrode; and a dielectric layer which is disposed between the first electrode and the second electrode and which is in contact with the first electrode. The first electrode includes a first portion including an interface between the first electrode and the dielectric layer, the dielectric layer includes a second portion including the interface, and the first portion and the second portion each contain silicon. A concentration distribution of the silicon along a thickness direction of the first portion and the second portion includes a convex portion intersecting the interface.