- 专利标题： STRAIN GAUGE WITH MECHANICALLY DECOUPLED TEMPERATURE SENSOR
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申请号： US15899204申请日： 2018-02-19
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公开(公告)号： US20190257703A1公开(公告)日： 2019-08-22
- 发明人: Daniele Caltabiano
- 申请人： STMicroelectronics S.r.l.
- 主分类号： G01L1/22
- IPC分类号： G01L1/22 ; G01D5/16 ; G01L1/18 ; G01L1/06 ; G01L1/04 ; G01B7/16
摘要：
A semiconductor device includes a strain gauge on a substrate, the strain gauge configured to measure a stress of the substrate; and a temperature sensor disposed within the substrate, the temperature sensor being decoupled from the stress of the substrate.
公开/授权文献
- US10782196B2 Strain gauge with mechanically decoupled temperature sensor 公开/授权日：2020-09-22
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