- 专利标题: METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE
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申请号: US16299621申请日: 2019-03-12
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公开(公告)号: US20190284387A1公开(公告)日: 2019-09-19
- 发明人: Takahiro DAZAI , Ken MIYAGI
- 申请人: TOKYO OHKA KOGYO CO., LTD.
- 优先权: JP2018-048196 20180315
- 主分类号: C08L53/00
- IPC分类号: C08L53/00 ; C08K5/435 ; C08K5/3415 ; C08L33/12 ; C08L25/06 ; B32B27/30
摘要:
A method of producing a structure containing a phase-separated structure, including using a resin composition for forming a phase-separated structure including a block copolymer having a period L0 and an ion liquid containing a compound (IL) having a cation moiety and an anion moiety to form a BCP layer containing a block copolymer and having a thickness of d (nm) on a substrate; and vaporizing at least a part of the compound (IL), and phase-separating the BCP layer to obtain a structure containing a phase-separated structure, wherein, in step (i), the BCP layer is formed such that the period L0 (nm) of the block copolymer and the thickness d (nm) of the BCP layer satisfies the following formula (1): Thickness d/Period L0=n+a (1) wherein n represents an integer of 0 or more; and a is a number which satisfies 0
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