- 专利标题: SHAPE MEASURING APPARATUS AND SHAPE MEASURING METHOD
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申请号: US16274345申请日: 2019-02-13
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公开(公告)号: US20190293407A1公开(公告)日: 2019-09-26
- 发明人: Kazuhiko TAHARA
- 申请人: KOBELCO RESEARCH INSTITUTE, INC.
- 申请人地址: JP Kobe-shi
- 专利权人: KOBELCO RESEARCH INSTITUTE, INC.
- 当前专利权人: KOBELCO RESEARCH INSTITUTE, INC.
- 当前专利权人地址: JP Kobe-shi
- 优先权: JP2018-056565 20180323
- 主分类号: G01B11/06
- IPC分类号: G01B11/06 ; G01B9/02 ; H04B10/64 ; G02B27/28
摘要:
A shape measuring apparatus of the present invention measures a variation in a thickness of an object to be measured WA based on an A surface reference interference light and an A surface measuring interference light obtained by performing optical heterodyne interference on a first A surface measuring light and a second A surface measuring light and a B surface reference interference light and a B surface measuring interference light obtained by performing the optical heterodyne interference on a first B surface measuring light and a second B surface measuring light. When the optical heterodyne interference is performed, the shape measuring apparatus makes the first A surface measuring light and the second B surface measuring light equal in frequency and makes the first B surface measuring light and the second A surface measuring light equal in frequency.
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