Invention Application
- Patent Title: METHOD AND DEVICE FOR MANUFACTURING LOW TEMPERATURE POLY-SILICON, AND LASER ASSEMBLY
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Application No.: US16113776Application Date: 2018-08-27
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Publication No.: US20190304782A1Publication Date: 2019-10-03
- Inventor: Tao Gao , Weifeng Zhou
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Priority: CN201810258840.6 20180327
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/67 ; B23K26/08

Abstract:
A method and device for manufacturing low temperature poly-silicon, and a laser assembly are provided. A method for manufacturing low temperature poly-silicon includes forming an amorphous silicon layer on a substrate; controlling a relative movement of a laser assembly to the substrate in a direction perpendicular to a thickness of the substrate, and controlling a laser beam emitted from the laser assembly to irradiate the amorphous silicon layer on the substrate, to recrystallize an amorphous silicon in a region to be irradiated with the laser beam in the amorphous silicon layer. In a direction of the substrate moving relative to the laser assembly, energy of the laser beam emitted by the laser assembly in a same period of time decreases gradually.
Public/Granted literature
- US10707077B2 Method and device for manufacturing low temperature poly-silicon, and laser assembly Public/Granted day:2020-07-07
Information query
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