- 专利标题: CHIP TRANSFER DEVICE AND CHIP TRANSFERING METHOD USING THE SAME
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申请号: US16282581申请日: 2019-02-22
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公开(公告)号: US20190304816A1公开(公告)日: 2019-10-03
- 发明人: Doyoung KWAG , Sangmoo PARK , Yoonsuk LEE
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 优先权: KR10-2018-0036333 20180329
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/687 ; H01L33/62 ; H01L25/075
摘要:
A chip transfer device is provided. The chip transfer device according to an embodiment includes a support, a plurality of pick-up modules disposed on the support in a horizontal direction, and movably connected to the support, and a controller configured to control the plurality of pick-up modules, wherein each of the plurality of pick-up modules is movable while collectively picking up a plurality of chips on a corresponding wafer among a plurality of wafers, and wherein the controller moves and adjusts the plurality of pick-up modules in a horizontal direction.
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