- 专利标题： METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A MEASURING TIP OF A SCANNING PROBE MICROSCOPE
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申请号： US16423687申请日： 2019-05-28
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公开(公告)号： US20190317126A1公开(公告)日： 2019-10-17
- 发明人: Gabriel Baralia , Rainer Becker , Kinga Kornilov , Christof Baur , Hans Hermann Pieper
- 申请人： Carl Zeiss SMT GmbH
- 优先权： DE102016223659.8 20161129
- 主分类号： G01Q60/38
- IPC分类号： G01Q60/38 ; G01Q70/08 ; H01J37/305 ; H01J37/317
摘要：
The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
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