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公开(公告)号：US20220291255A1
公开(公告)日：2022-09-15
申请号：US17829922
申请日：2022-06-01
申请人： Carl Zeiss SMT GmbH
IPC分类号： G01Q60/38 , H01J37/317 , H01J37/305 , G01Q70/08
摘要： The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
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2.发明申请公开(公告)号：US20190317126A1
公开(公告)日：2019-10-17
申请号：US16423687
申请日：2019-05-28
申请人： Carl Zeiss SMT GmbH
IPC分类号： G01Q60/38 , G01Q70/08 , H01J37/305 , H01J37/317
摘要： The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
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公开(公告)号：US11353478B2
公开(公告)日：2022-06-07
申请号：US16423687
申请日：2019-05-28
申请人： Carl Zeiss SMT GmbH
IPC分类号： G01Q60/38 , G01Q70/08 , H01J37/305 , H01J37/317
摘要： The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
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