- 专利标题： Sequential material sources for thermally challenged OLED materials
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申请号： US16429745申请日： 2019-06-03
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公开(公告)号： US20190386256A1公开(公告)日： 2019-12-19
- 发明人: William E. QUINN , Julia J. BROWN , Gregory MCGRAW , Gregg KOTTAS , William T. MAYWEATHER, III
- 申请人： Universal Display Corporation
- 主分类号： H01L51/56
- IPC分类号： H01L51/56 ; H01L51/00 ; C23C14/22 ; C23C14/12 ; C23C14/54
摘要：
Systems and techniques for deposition such as via OVJP using multiple source ampules are provided. The source ampules are arranged and controlled such that carrier gas may be fed through each source ampule sequentially, thereby allowing for more continuous operation and use of materials that otherwise would be subject to thermal degradation.
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