- 专利标题： SUPPLY LINE GUIDE FOR A VACUUM PROCESSING SYSTEM, USE OF A SUPPLY LINE GUIDE AND PROCESSING SYSTEM
-
申请号： US15764311申请日： 2017-04-07
-
公开(公告)号： US20200016557A1公开(公告)日： 2020-01-16
- 发明人: Andre BRÜNING , Andreas SAUER
- 申请人： Andre BRÜNING , Andreas SAUER , Applied Materials, Inc.
- 国际申请： PCT/EP2017/058373 WO 20170407
- 主分类号： B01J3/02
- IPC分类号： B01J3/02 ; C23C14/12 ; C23C14/24 ; C23C14/56 ; H01L51/56
摘要：
A supply line guide for guiding a plurality of supply lines in a vacuum chamber of a processing system is described. The supply line guide includes a guiding arrangement including a plurality of connected elements, wherein the connected elements are angle-adjustable relative to each other. Further, the supply line guide includes a flexible tube provided around the guiding arrangement.
信息查询
