• Patent Title: METHOD FOR FORMING PATTERN FOR LIQUID CRYSTAL ORIENTATION OF ZENITHAL BI-STABLE LIQUID CRYSTAL PANEL, LIQUID CRYSTAL ORIENTATION SUBSTRATE INCLUDING PATTERN FORMED THEREBY, AND MASK SUBSTRATE USED FOR FORMING PATTERN
  • Application No.: US16491552
    Application Date: 2018-02-13
  • Publication No.: US20200033656A1
    Publication Date: 2020-01-30
  • Inventor: So Young CHOOJin Soo LEEEun Kyu HERBu Gon SHIN
  • Applicant: LG CHEM, LTD.
  • Priority: KR10-2017-0028839 20170307
  • International Application: PCT/KR2018/001898 WO 20180213
  • Main IPC: G02F1/1337
  • IPC: G02F1/1337 G02F1/139 G03F7/00
METHOD FOR FORMING PATTERN FOR LIQUID CRYSTAL ORIENTATION OF ZENITHAL BI-STABLE LIQUID CRYSTAL PANEL, LIQUID CRYSTAL ORIENTATION SUBSTRATE INCLUDING PATTERN FORMED THEREBY, AND MASK SUBSTRATE USED FOR FORMING PATTERN
Abstract:
Disclosed are a method for forming a pattern for liquid crystal orientation of a zenithal bi-stable liquid crystal panel, a liquid crystal orientation substrate including the pattern formed thereby, and a mask substrate used for forming the pattern. The method includes: (a) depositing a silicon-based compound on a silicon substrate, (b) forming a guide pattern on an upper portion of the deposited silicon-based compound layer by using an imprint lithography, (c) discontinuously exposing the silicon substrate by transferring a pattern from the guide pattern onto the silicon-based compound layer by dry etching, (d) forming a pattern in an asymmetrical form on the silicon substrate by wet etching, (e) removing the part of the remaining silicon-based compound layer, and then hydrophobically treating a pattern surface of the silicon substrate; and (f) transferring a pattern in an asymmetrical form onto a glass substrate by disposing the surface-treated silicon substrate to face the glass substrate, and supplying a dielectric therebetween.
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