Invention Application
- Patent Title: METHOD FOR FORMING PATTERN FOR LIQUID CRYSTAL ORIENTATION OF ZENITHAL BI-STABLE LIQUID CRYSTAL PANEL, LIQUID CRYSTAL ORIENTATION SUBSTRATE INCLUDING PATTERN FORMED THEREBY, AND MASK SUBSTRATE USED FOR FORMING PATTERN
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Application No.: US16491552Application Date: 2018-02-13
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Publication No.: US20200033656A1Publication Date: 2020-01-30
- Inventor: So Young CHOO , Jin Soo LEE , Eun Kyu HER , Bu Gon SHIN
- Applicant: LG CHEM, LTD.
- Priority: KR10-2017-0028839 20170307
- International Application: PCT/KR2018/001898 WO 20180213
- Main IPC: G02F1/1337
- IPC: G02F1/1337 ; G02F1/139 ; G03F7/00

Abstract:
Disclosed are a method for forming a pattern for liquid crystal orientation of a zenithal bi-stable liquid crystal panel, a liquid crystal orientation substrate including the pattern formed thereby, and a mask substrate used for forming the pattern. The method includes: (a) depositing a silicon-based compound on a silicon substrate, (b) forming a guide pattern on an upper portion of the deposited silicon-based compound layer by using an imprint lithography, (c) discontinuously exposing the silicon substrate by transferring a pattern from the guide pattern onto the silicon-based compound layer by dry etching, (d) forming a pattern in an asymmetrical form on the silicon substrate by wet etching, (e) removing the part of the remaining silicon-based compound layer, and then hydrophobically treating a pattern surface of the silicon substrate; and (f) transferring a pattern in an asymmetrical form onto a glass substrate by disposing the surface-treated silicon substrate to face the glass substrate, and supplying a dielectric therebetween.
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