Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Application No.: US16492282Application Date: 2018-02-28
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Publication No.: US20200052099A1Publication Date: 2020-02-13
- Inventor: Shunpei YAMAZAKI , Toshihiko TAKEUCHI , Naoto YAMADE , Hiroshi FUJIKI , Tomoaki MORIWAKA , Shunsuke KIMURA
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: KR ATSUGI-SHI, KANAGAWA-KEN
- Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee Address: KR ATSUGI-SHI, KANAGAWA-KEN
- Priority: JP2017-047420 20170313; JP2017-072177 20170331
- International Application: PCT/IB2018/051253 WO 20180228
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/10

Abstract:
A semiconductor device that can be miniaturized or highly integrated is provided. The semiconductor device includes a first conductor, a second conductor over the first conductor, a first insulator covering the second conductor, a first oxide over the first insulator, and a second oxide over the first oxide, an opening overlapping with at least part of the first conductor is provided in the first oxide and the first insulator, and the second oxide is electrically connected to the first conductor through the opening.
Public/Granted literature
- US11004961B2 Semiconductor device and method for manufacturing semiconductor device Public/Granted day:2021-05-11
Information query
IPC分类: