Invention Application
- Patent Title: LOAD PORT
-
Application No.: US16678661Application Date: 2019-11-08
-
Publication No.: US20200071091A1Publication Date: 2020-03-05
- Inventor: Atsushi SUZUKI , Yasushi TANIYAMA
- Applicant: SINFONIA TECHNOLOGY CO., LTD.
- Applicant Address: JP Minato-ku
- Assignee: SINFONIA TECHNOLOGY CO., LTD.
- Current Assignee: SINFONIA TECHNOLOGY CO., LTD.
- Current Assignee Address: JP Minato-ku
- Priority: JP2015-154593 20150804
- Main IPC: B65G49/00
- IPC: B65G49/00 ; H01L21/67 ; H01L21/677 ; H01L21/673

Abstract:
A load port including: a base as part of a wall partitioning a transportation space from an external space; an opening provided to the base; a door configured to open and close the opening and securing a lid to, and releasing a lid from, a container containing contents; and a first seal member for sealing the space between the base and the container. At least some of the container-side end surface of the door is located nearer to the transportation space than the container-side end part of the first seal member. The load port can keep a surrounding space clean when a FOUP is connected to a casing.
Public/Granted literature
- US10947063B2 Load port Public/Granted day:2021-03-16
Information query
IPC分类: