公开(公告)号：US20200071091A1

公开(公告)日：2020-03-05

申请号：US16678661

申请日：2019-11-08

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Atsushi SUZUKI ,  Yasushi TANIYAMA

IPC: B65G49/00 ,  H01L21/67 ,  H01L21/677 ,  H01L21/673

Abstract: A load port including: a base as part of a wall partitioning a transportation space from an external space; an opening provided to the base; a door configured to open and close the opening and securing a lid to, and releasing a lid from, a container containing contents; and a first seal member for sealing the space between the base and the container. At least some of the container-side end surface of the door is located nearer to the transportation space than the container-side end part of the first seal member. The load port can keep a surrounding space clean when a FOUP is connected to a casing.

公开(公告)号：US20180229945A1

公开(公告)日：2018-08-16

申请号：US15750376

申请日：2016-07-12

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Atsushi SUZUKI ,  Yasushi TANIYAMA

IPC: B65G49/00 ,  H01L21/67

CPC classification number: B65G49/00 ,  H01L21/67201 ,  H01L21/67393 ,  H01L21/67772

Abstract: A load port including: a base as part of a wall partitioning a transportation space from external space; an opening provided to the base; a door configured to open and close the opening and securing a lid to, and releasing a lid from, a container containing contents; and a first seal member for sealing the space between the base and the container. At least some of the container-side end surface of the door is located nearer to the transportation space than the container-side end part of the first seal member. The load port can keep a surrounding space clean when a FOUP is connected to a casing.