Invention Application
- Patent Title: METHOD FOR MAKING A WELL DISPOSED OVER A SENSOR
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Application No.: US16687630Application Date: 2019-11-18
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Publication No.: US20200090947A1Publication Date: 2020-03-19
- Inventor: Phil WAGGONER , Jordan OWENS
- Applicant: LIFE TECHNOLOGIES CORPORATION
- Main IPC: H01L21/311
- IPC: H01L21/311 ; G01N27/414 ; H01L21/02 ; H01L21/027 ; H01L21/285 ; H01L21/3213

Abstract:
A method for forming a well providing access to a sensor pad includes patterning a first photoresist layer over a dielectric structure disposed over the sensor pad; etching a first access into the dielectric structure and over the sensor pad, the first access having a first characteristic diameter; patterning a second photoresist layer over the dielectric structure; and etching a second access over the dielectric structure and over the sensor pad. The second access has a second characteristic diameter. The first and second accesses overlapping. A diameter ratio of the first characteristic diameter to the second characteristic diameter is not greater than 0.7. The first access exposes the sensor pad. The second access has a bottom depth less than a bottom depth of the first access.
Public/Granted literature
- US11004690B2 Method for making a well disposed over a sensor Public/Granted day:2021-05-11
Information query
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