- 专利标题: Fan Filter Unit, Sterilization Apparatus and Clean Room
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申请号: US16470276申请日: 2018-02-15
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公开(公告)号: US20200096229A1公开(公告)日: 2020-03-26
- 发明人: Makoto YOKOYAMA , Takeshi MATSUMURA , Hirotoshi SATO
- 申请人: Hitachi Industrial Equipment Systems Co., Ltd.
- 优先权: JP2017-111702 20170606
- 国际申请: PCT/JP2018/005258 WO 20180215
- 主分类号: F24F13/28
- IPC分类号: F24F13/28 ; F24F7/06
摘要:
Provided are a fan filter unit and a sterilization apparatus capable of shortening a sterilization operation time to be performed at a changeover. The sterilization apparatus has: a working space; a fan filter unit for supplying clean air to the working space; and a sterilizing gas charging unit on the air suction side of the fan filter unit. The fan filter unit comprises: a fan unit section constituted by an air blower and a pressurization chamber; a dust removal filter provided on the downstream side of the fan unit section; a passage bypassing the dust removal filter; and an opening and closing mechanism of the passage. By opening the opening and closing mechanism, the air flow not passing through the dust removal filter can be supplied to the secondary side of the fan filter unit.
公开/授权文献
- US11112143B2 Fan filter unit, sterilization apparatus and clean room 公开/授权日:2021-09-07
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