公开(公告)号：US20220136951A1

公开(公告)日：2022-05-05

申请号：US17254673

申请日：2020-04-15

申请人： Hitachi Industrial Equipment Systems Co., Ltd.

发明人： Takeshi KANEKO ,  Hirotoshi SATO ,  Toshihiko SUWA ,  Makoto YOKOYAMA ,  Haruhiko ADACHI ,  Takeshi MATSUMURA

IPC分类号： G01N15/08

摘要： Provided is a fan filter unit with which the performance of a HEPA filter can be measured at multiple points with ease and in a short time. The fan filter unit has a first HEPA filter, a second HEPA filter, and exhaust means installed between the first HEPA filter and the second HEPA filter. The first HEPA filter, the second HEPA filter, and the exhaust means are integrated by a housing.

公开(公告)号：US20200096229A1

公开(公告)日：2020-03-26

申请号：US16470276

申请日：2018-02-15

申请人： Hitachi Industrial Equipment Systems Co., Ltd.

发明人： Makoto YOKOYAMA ,  Takeshi MATSUMURA ,  Hirotoshi SATO

IPC分类号： F24F13/28 ,  F24F7/06

摘要： Provided are a fan filter unit and a sterilization apparatus capable of shortening a sterilization operation time to be performed at a changeover. The sterilization apparatus has: a working space; a fan filter unit for supplying clean air to the working space; and a sterilizing gas charging unit on the air suction side of the fan filter unit. The fan filter unit comprises: a fan unit section constituted by an air blower and a pressurization chamber; a dust removal filter provided on the downstream side of the fan unit section; a passage bypassing the dust removal filter; and an opening and closing mechanism of the passage. By opening the opening and closing mechanism, the air flow not passing through the dust removal filter can be supplied to the secondary side of the fan filter unit.