发明申请
- 专利标题: INTER-DECK PLUG IN THREE-DIMENSIONAL MEMORY DEVICE AND METHOD FOR FORMING THE SAME
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申请号: US16194267申请日: 2018-11-16
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公开(公告)号: US20200111807A1公开(公告)日: 2020-04-09
- 发明人: Qianbin Xu , Haohao Yang , EnBo Wang , Yong Zhang , Jialan He
- 申请人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L27/1157
摘要:
Embodiments of 3D memory devices having an inter-deck plug and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a first memory deck including interleaved conductor and dielectric layers above the substrate, a second memory deck including interleaved conductor and dielectric layers above the first memory deck, and a first and a second channel structure each extending vertically through the first or second memory deck. The first channel structure includes a first memory film and semiconductor channel along a sidewall of the first channel structure, and an inter-deck plug in an upper portion of the first channel structure and in contact with the first semiconductor channel. A lateral surface of the inter-deck plug is smooth. The second channel structure includes a second memory film and semiconductor channel along a sidewall of the second channel structure. The second semiconductor channel is in contact with the inter-deck plug.
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