Invention Application
- Patent Title: MAGNETORESISTIVE RANDOM ACCESS MEMORY THIN FILM TRANSISTOR UNIT CELL
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Application No.: US16159798Application Date: 2018-10-15
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Publication No.: US20200119093A1Publication Date: 2020-04-16
- Inventor: Praveen JOSEPH , Xuefeng LIU , Gauri KARVE , Eric Raymond EVARTS
- Applicant: International Business Machines Corporation
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/08 ; H01L43/12 ; H01L43/02 ; H01L43/10

Abstract:
A MRAM-TFT unit cell and a method for fabricating the same. The MRAM-TFT unit cell includes a MRAM device and a TFT device electrically coupled to the MRAM device. The MRAM device and the TFT device are situated within a common plane of the MRAM-TFT cell. The method includes forming a TFT device comprising a source/drain region, and a semiconducting layer on a substrate. A magnetic tunnel junction stack (MTJ) is formed in contact with the source region. A first contact is formed on the MTJ, and a second contact is formed on the drain region. A first interconnect metal layer is formed in contact with the first contact, and a second first interconnect metal layer is formed in contact with the second contact. A third contact is formed on a gate region of the TFT device. A third interconnect metal layer is formed in contact with the third contact.
Public/Granted literature
- US10727273B2 Magnetoresistive random access memory thin film transistor unit cell Public/Granted day:2020-07-28
Information query
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