Invention Application
- Patent Title: INTEGRATED DEVICE WITH VERTICAL FIELD-EFFECT TRANSISTORS AND HYBRID CHANNELS
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Application No.: US16691732Application Date: 2019-11-22
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Publication No.: US20200161303A1Publication Date: 2020-05-21
- Inventor: ZHENXING BI , Kangguo CHENG , ZHENG XU , DEXIN KONG
- Applicant: International Business Machines Corporation
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/20 ; H01L29/78 ; H01L29/10 ; H01L21/8238 ; H01L21/033 ; H01L29/08 ; H01L29/66

Abstract:
An integrated semiconductor device includes a substrate, a first vertical transistor, and a second vertical transistor. The substrate has a first substrate region and a second substrate region. The first vertical transistor is disposed on the substrate in the first substrate region. The first vertical transistor is n-type field-effect vertical transistor (n-VFET) with a first channel crystalline orientation. The second vertical transistor is disposed on the substrate in the second substrate region. The second vertical transistor is p-type field-effect vertical transistor (p-VFET) with a second channel crystalline orientation. The first channel crystalline orientation is different from the second channel orientation. A common bottom source and drain region as well as common bottom and top spacers regions are provided for the first vertical transistor and the second vertical transistor.
Public/Granted literature
- US11075200B2 Integrated device with vertical field-effect transistors and hybrid channels Public/Granted day:2021-07-27
Information query
IPC分类: