Invention Application
- Patent Title: ENHANCED ADHESIVE MATERIALS AND PROCESSES FOR 3D APPLICATIONS
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Application No.: US16750719Application Date: 2020-01-23
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Publication No.: US20200165494A1Publication Date: 2020-05-28
- Inventor: James L. Hedrick , Robert D. Miller , Deborah A. Neumayer , Sampath Purushothaman , Mary E. Rothwell , Willi Volksen , Roy R. Yu
- Applicant: International Business Machines Corporation
- Main IPC: C09J9/00
- IPC: C09J9/00 ; H01L23/48 ; H01L23/00 ; H01L21/683 ; H01L21/768 ; C09J11/04 ; H01L25/00 ; H01L25/065 ; C09J183/04 ; C09J179/08 ; C09J179/04 ; C09J11/06 ; H01L23/60

Abstract:
The present invention relates to CNT filled polymer composite system possessing a high thermal conductivity and high temperature stability so that it is a highly thermally conductive for use in 3D and 4D integration for joining device sub-laminate layers. The CNT/polymer composite also has a CTE close to that of Si, enabling a reduced wafer structural warping during high temperature processing cycling. The composition is tailored to be suitable for coating, curing and patterning by means conventionally known in the art.
Public/Granted literature
- US11168234B2 Enhanced adhesive materials and processes for 3D applications Public/Granted day:2021-11-09
Information query
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