Invention Application
- Patent Title: THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE
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Application No.: US16592886Application Date: 2019-10-04
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Publication No.: US20200168547A1Publication Date: 2020-05-28
- Inventor: BONGSOON LIM , SANG-WAN NAM , SANG-WON PARK , SANG-WON SHIM , HONGSOO JEON , YONGHYUK CHOI
- Applicant: Samsung Electronics Co., Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1dcb6d81
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L27/11582 ; H01L27/11573

Abstract:
A three-dimensional semiconductor memory device may include a first stack structure block including first stack structures arranged in a first direction on a substrate, a second stack structure block including second stack structures arranged in the first direction on the substrate, a separation structure disposed on the substrate between the first and second stack structure blocks and including first mold layers and second mold layers, and a contact plug penetrating the separation structure. A bottom surface of the contact plug may contact the substrate.
Public/Granted literature
- US11495541B2 Three-dimensional semiconductor memory device Public/Granted day:2022-11-08
Information query
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